![]() ![]() In addition, we developed the theoretical model of the transmission and detection type gyroscope device using Mason's equivalent circuit model. A preliminary experiment to demonstrate the Coriolis force detection by the transmission and detection type gyroscope have been performed by using a combination of the large shear mode PZT plate operating in the MHz range, instead of the c-axis tilted ScAlN film devices operating in the sub GHz range. Although we could not fabricate the setup of the Coriolis force detection experiment for the thin film MEMS devices, a large measurement system for large PZT plate device could be prepared. Thus, the polarities of shear wave generated at input piezoelectric film and detected at output piezoelectric film are orthogonal. In addition, we developed the theoretical model of the transmission and detection type gyroscope device using Mason's equivalent circuit model.ĪB - Transmission and detection type MEMS gyroscope with a combination of two c-axis tilted ScAlN films where in-plane tilt angles are orthogonal to each other are fabricated. ![]() N2 - Transmission and detection type MEMS gyroscope with a combination of two c-axis tilted ScAlN films where in-plane tilt angles are orthogonal to each other are fabricated. How it works Normal rotating mechanical gyroscopes like found on aircraft and ships use gyroscopic forces to detect changes in rotation. You can add upto three together to sense all 3 axises (yaw, pitch and roll). It is used to sense changes in direction just like a rate gyroscope. ![]() The brushless motor was provided by ASAHI-ENG CO., LTD. This is electronic component that is just 21mm by 8mm. JPMJCR20Q1), JST FOREST, and KAKENHI (Grant-in-Aid for Scientific Research B, No.19H02202, No.21K18734). This work was supported by JST CREST (No. T1 - A piezoelectric gyroscope with tilted c-axis ScAlN thin-films ![]()
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